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Systems

944 System

ELAS System

R&D System

Asher System

Materials

Sputtering Targets and
Evaporation Materials

Target Bonding

Backing Plates

Fabrication and Quality
Control

General Materials List

 

 

Target Bonding

Target Bonding - Metallic & Silver Filled Epoxy
Typically, target bonding is done using an Indium-based alloy which enables convenient removal of spent targets for backing plate re-use. Certain types of materials require a silver filled epoxy, which is used to adhere the target material to the backing plate. In either case, a protective barrier layer is deposited onto the bond side of the material. This process increases adhesion characteristics, thermal properties, and prevents solder diffusion.

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Metallic bonded target ready
for QC and final cleanup
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Target bonding with our in-house e-beam evaporator.

 

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