Systems
944 System
ELAS System
R&D System
Asher System
Materials
Sputtering Targets and
Evaporation Materials
Target Bonding
Backing Plates
Fabrication and Quality
Control
General Materials List
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944 System
Ease of System Maintenance is just one of the 944 features. The system has been designed by service engineers to specifically allow for easy system maintenance.
Many software features added to make system set-up easy. In addition, the 944 can be used with a variety of different substrates and materials.
Features
- Dual level load lock
- CTI 10” cryo pump on chamber as standard.
- CTI 8” cryo, turbo pump or rotary pump available on load lock.
- RF etch cooling station as standard.
- 4 Target Sputtering Ion Beam Milling System
- Fully automated process control.
944 Front
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944 Back
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IBM Option |
IBM Option |
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