Asher System
Introduction
- ESC produces Ashing systems to meet its customer's requirements.
- ESC first discusses the customer's process such as type of resist and product tolerances.
- ESC designs a system to match the process specification.
- Technical Drawings are produced.
Main System Components After the Build
- The system is extensively tested ensuring that the system runs free of any faults.
- The customer is then invited to ESC to carry out agreed acceptance tests.
- Initial training is performed at this time.
Installation
- After delivery and installation at the customer's fab, ESC will prepare equipment for site acceptance.
- ESC and customer process engineers carry out the agreed on-site acceptance tests.